Concerning the problems and challenges in Cyber Physical System (CPS), a new modeling and verification method of CPS was proposed based on service composition ideas. Firstly, a composition structure of CPS was proposed, including the physical world, sensor systems, information processing systems, control systems and time constraints. Based on this proposed structure, the service classification and composition framework of CPS resources were proposed. The physical environment modeling, atomic service modeling and service composition of CPS were also given based on the timed automata theory. Finally, through case design and model checking tool Uppaal, the experimental results were given to illustrate the correctness of the CPS service-oriented modeling approach, including system security, accessibility, liveness and time constraints. The results verify the above properties and the correctness of the proposed method.